線性納米定位器SLC-24系列具有緊湊的結(jié)構(gòu)和微小的外形尺寸,可以植入位置傳感器從而更好地勝任微納定位任務(wù).
線性納米定位器SLC-24系列產(chǎn)品都能達(dá)到blocking force FB > 3.5 N, 力FN~30 N,Lift force FL>11.5N,速度達(dá)到20mm/s。
線性納米定位器SLC-24系列規(guī)格參數(shù)
型號 | SLC-2430 | SLC-2445 | SLC-2460 | SLC-2475 | SLC-2490 | SLC-24105 | SLC-24120 | SLC-24150 | SLC-24180 |
分辨率 | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm |
負(fù)載 | 20N(2kg) | 30N(3kg) | 30N(3kg) | 30N(3kg) | 30N(3kg) | 30N(3kg) | 30N(3kg) | 30N(3kg) | 30N(3kg) |
適合真空度 | 10-11 mbar | 10-11 mbar | 10-11 mbar | 10-11 mbar | 10-11 mbar | 10-11 mbar | 10-11 mbar | 10-11 mbar | 10-11 mbar |
行程范圍 | 16mm (±6mm) | 29mm (±14.5mm) | 35mm (±17.5mm) | 49mm (± 24.5mm) | 63mm (± 31.5mm) | 69mm (± 34.5mm) | 83mm (± 41.5mm) | ± 51.5 (103) mm | ± 61.5 (123) mm |
步進(jìn)1 | 1-1500nm | 1-1500nm | 1-1500nm | 1-1500nm | 1-1500nm | 1-1500nm | 1-1500nm | 1-1500nm | 1-1500nm |
掃描范圍 | >1.5um | >1.5um | >1.5um | >1.5um | >1.5um | >1.5um | >1.5um | >1.5um | >1.5um |
掃描分辨率 | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm |
速度 | >20mm/s | >20mm/s | >20mm/s | >20mm/s | >20mm/s | >20mm/s | >20mm/s | >20mm/s | >20mm/s |
頻率 | 18.5KHz | 18.5KHz | 18.5KHz | 18.5KHz | 18.5KHz | 18.5KHz | 18.5KHz | 18.5KHz | 18.5KHz |
阻尼力Fb | >3.5N | >3.5N | >3.5N | >3.5N | >3.5N | >3.5N | >3.5N | >3.5N | >3.5N |
正向力Fn | 20N | 30N | 30N | 30N | 30N | 30N | 30N | 30N | 30N |
升力Fl | >1.5N | >1.5N | >1.5N | >1.5N | >1.5N | >1.5N | >1.5N | >1.5N | >1.5N |
尺寸 | 30x24x10.5 mm^3 | 45x24x10.5 mm^3 | 60x24x10.5 mm^3 | 75x24x10.5 mm^3 | 90x24x10.5 mm3 | 105x24x10.5x mm3 | 120x24x10.5 mm^3 | 150x24x10.5 mm^3 | 180x24x10.5 mm^3 |
重量 | 36g | 54g | 72g | 90g | 108g | 126g | 144g | 180g | 216g |
pitch俯仰力矩Mp | 2.2Nm | 7.5Nm | 12.8Nm | 18.1Nm | 29.5Nm | 37.5 Nm | 49.1Nm | 49.1Nm | 49.1Nm |
yaw偏航力矩My | 2.2Nm | 7.5Nm | 12.8Nm | 18.1Nm | 29.5Nm | 37.5 Nm | 49.1Nm | 49.1Nm | 49.1Nm |
roll扭轉(zhuǎn)力矩Mr | 1.5Nm | 2.6Nm | 3.2Nm | 3.9Nm | 4.8Nm | 5.8Nm | 6.1Nm | 6.1Nm | 6.1Nm |
Closed-Loop-S 傳感器分辨率 | 1nm | 1nm | 1nm | 1nm | 1nm | 1nm | 1nm | 1nm | 1nm |
Closed-Loop-S 重復(fù)精度2 | +/-30nm | +/-45nm | +/-60nm | +/-75nm | +/-90nm | +/-105nm | +/-120nm | +/-150nm | +/-180nm |
Closed-Loop-L 傳感器分辨率 | 4nm | 4nm | 4nm | 4nm | 4nm | 4nm | 4nm | 4nm | 4nm |
Closed-Loop-L 閉環(huán)分辨率 | ±500nm(H)CU 4nm MCS | ±500nm(H)CU 4nm MCS | ±500nm(H)CU 4nm MCS | ±500nm(H)CU 4nm MCS | ±500nm(H)CU 4nm MCS | ±500nm(H)CU 4nm MCS | ±500nm(H)CU 4nm MCS | ±500nm(H)CU 4nm MCS | ±500nm(H)CU 4nm MCS |
Closed-Loop-L 重復(fù)精度 | ±1um(H)CU ±60nm MCS | ±1um(H)CU ±90nm MCS | ±1um(H)CU ±120nm MCS | ±1um(H)CU ±150nm MCS | ±1um(H)CU ±180nm MCS | ±1um(H)CU ±210nm MCS | ±1um(H)CU ±240nm MCS | ±1um(H)CU ±300nm MCS | ±1um(H)CU ±360nm MCS |