| 1. | 設(shè)備名稱： | 霍爾效應(yīng)測試儀 |
| 2. | 功能描述： | 測量半導(dǎo)體薄膜中載流子類型、載流子濃度、遷移率、電阻率、霍爾系數(shù)等參數(shù) |
| 3. | 技術(shù)參數(shù)： | |
| 3-1 | 測試范圍： | Si, SiGe, SiC, GaAs, InGaAs, InP, GaN (N Type & P Type)等材質(zhì)的半導(dǎo)體薄膜中載流子類型、載流子濃度、遷移率、電阻率、霍爾系數(shù)等參數(shù) |
| 3-2 | 磁場： | |
| 3-2-1 | 磁場強度： | 0.45T(等同或優(yōu)于此強度) |
| 3-2-2 | 磁場類型： | 永磁體磁體 |
| 3-2-3 | 磁場均勻性： | 磁場不均勻性＜±1 % 10年內(nèi)磁場變化＜±0.2% |
| 3-3 | 溫 度： | |
| 3-3-1 | 溫度區(qū)域： | 77K和300K |
| 3-4 | 電阻率范圍： | 1 μ Ohm*cm ~10 M Ohm*cm |
| 3-5 | 電阻范圍： | 0.1 m Ohms ~10 G Ohms |
| 3-6 | 載流子濃度： | 107~1021cm-3 |
| 3-7 | 遷移率： | 10-2~107 cm2/volt*sec |
| 3-8 | 輸入電流： | |
| 3-8-1 | 電流范圍： | 1000 pA~10mA |
| 3-8-2 | 電流解析度： | 1 pA (lowest range) |
| 3-8-3 | 電流精度： | 2% |
| 3-9 | 輸入電壓： | |
| 3-9-1 | 電壓范圍： | ±10V |
| 3-9-2 | 電壓分辨率： | 1μV |
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| 4. | 儀器特點： | |
| 4-1 | Automatic or manual current selection 自動或手動模式(電流控制磁場模式) | |
| 4-2 | Automatic contact check 自動接觸檢查(歐姆接觸) | |
| 4-3 | Routine and enhanced software 常規(guī)和增強軟件 | |
| 4-4 | Differential resistivity measurements by I/V-curves I/V曲線測試電阻率差異 | |
| 4-5 | Bench top permanent magnet 永磁體 | |
| 4-6 | Misalignment voltage compensation 失調(diào)電壓補償 | |
| 4-7 | Correction of slow sample drift voltage, especially for ZnO, 修正慢樣品漂移電壓，特別是氧化鋅 | |
| 4-8 | Automatic field calibration 自動現(xiàn)場標(biāo)定 | |
| 4-9 | Large concentration and resistivity range 大濃度和電阻率范圍 | |
| 4-10 | Flexible, modular hardware 靈活的模塊化硬件 | |
| 4-11 | Support of various magnets, for example BioRad HL 5200 支持多樣磁場 | |
| 4-12 | Support of various temperature controllers 支持各種溫度控制器(支持客戶自行升級變溫系統(tǒng)) | |
| 4-13 | Van der Pauw and bar shape (bridge-type) Hall samples 支持范德堡和霍爾巴法測試霍爾 | |
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| 5 | 硬件 | |
| 5-1 | The standard system consists of a bench top electronic system, a small magnet and a sample stage for room temperature and LN2 measurements. 標(biāo)準(zhǔn)系統(tǒng)包含電子測試系統(tǒng)、磁場和兩個溫度區(qū)域的測試平臺（室溫和液氮溫度） | |
| 5-2 | The electronics include the current source, the voltage measurement part, the contact switching module, the magnet power supply and the IEEE or RS232 interface. It is completely micro processor controlled. 電子測試系統(tǒng)包括由單片機控制的電流源、電壓測試、接觸開關(guān)模塊、磁場電源、IEEE或RS232接口 | |
| 5-3 | The contact switching module is designed to allow all possible measurement configurations. 接觸開關(guān)模塊支持所有用戶用于其他的配置(用戶可以采用制冷機做變溫霍爾測試) | |
| 5-4 | The current source has adjustable limits for voltage and/or power. {+++} 電流源具有可調(diào)電壓和/或電源的限制 | |
| 5-5 | Voltage measurement provides different input amplifiers optimized for either low current or low voltage applications. 電壓測量提供了不同的輸入放大器或低電流或低電壓應(yīng)用的優(yōu)化。 | |
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| 6 | 軟件界面 | |
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