功能
- 監(jiān)控和控制多達(dá) 8 種材料的同時(shí)沉積過(guò)程
- 從 0.1 至 10,000 ?/s 的沉積速率
- 集成式 EIES 和 QCM 薄膜過(guò)程控制
- 12 個(gè)繼電器輸出和 16 個(gè)數(shù)字輸入
- 用于設(shè)置與操作的基于 Windows 的軟件
- 與 INFICON Sentinel® 傳感器兼容
規(guī)格
| 類(lèi)型 | Guardian EIES Controller | |
|---|---|---|
| 傳感器 | ||
| 工作壓力 | <5x10-4 Torr | |
| 溫度 | 450° C maximum during operation and/or bakeout | |
| 尺寸（近似） | 0.75 in. x 1.25 in. x 1.75 in. (19 mm x 32 mm x 45 mm) | |
| 絲極壽命（典型值） | ~1000 hours at 2mA emission (Yttria), 4mA for Thoria | |
| 傳感器饋入件連桿 | Rigid ss tube, adjustable from 7 in. to 22 in. (175 mm to 550 mm) | |
| 饋入件 / 法蘭 | One optical and four electrical feedthroughs on 2.75 in.CF (NW35CF) | |
| 檢測(cè)器 | ||
| 光電倍增管 (PMT) | Hamamatsu R7518 or equivalent | |
| 光譜響應(yīng) | 185 to 730 nm | |
| 檢測(cè)限值 | Better than 5 fW of optical input power | |
| PMT 增益 | 103 to 107 (detectors are independently adjustable) | |
| 輸出分辨率 | 20-bit | |
| 光入射口 | Built-in filter holder, for filters up to 1 in. (25mm) diameter and 0.2 in. (5mm) thick | |
| 尺寸 | 2 in. x 5.5 in. x 2.75 in. (50 mm x 140 mm x 70 mm) mounting holes on three sides (optional mounting brackets available) | |
| 控制器 | ||
| 傳感器 | 016-600-G22: Standard Sensor Assembly 22 in. 016-601-G22: Gas Compensating Sensor Assembly 22 in. | |
| 檢測(cè)器 | Eight optical detector channels | |
| 控制輸出 | Eight source control outputs, 0 to ±10 VDC programmable | |
| 數(shù)字 I/O | 12 relay outputs and 12 logic inputs | |
| 功率 | 100-240 VAC, 50/60Hz, 150W | |
| 尺寸 | 19 in. x 3.5 in. x 12 in. (483 mm x 89 mm x 305 mm) | |
| 合規(guī)性 | CE | |
| 用戶(hù)界面軟件： | Windows®-based setup program included with Controller | |
| 軟件顯示沉積速率： | 4-digit numeric display of all channels, from 0.001 to 9999 ?/s, and graphical X-Y scrolling plot with selectable scales. | |
| 軟件顯示厚度： | 4-digit numeric display with range selection, from 0.001 to 9999 K? | |
| 用戶(hù)自備計(jì)算機(jī)： | Any PC with Windows®Vista/XP/2000 operating system, and Ethernet or RS-232 interface | |
Guardian EIES 控制器
