升華爐Sublimation furnace

功率Power

5KW

電壓Voltage

AC220V  50/60Hz

加熱元件heating element

進口KTL電阻絲 resistance wire

加熱區(qū)heating zone

3區(qū)，3點獨立控溫  three zones,three points temp. control independently

溫區(qū)長度 length of zone

200+300+200mm（可定制）(customizable)

升華區(qū)及保溫區(qū)溫度Sublimation area and insulation zone temperature

室溫至800℃，連續(xù)可調

Continuously adjustable from room temperature to 800 ° C

控溫方式Temperature Controller

數(shù)字工控儀表與PLC雙控，模糊型PID控制。

PID automatic and double  control by digital  industrial instrument ａnd PLC

無紙記錄Paperless record

內置存儲記錄運行工藝數(shù)據(jù)，外接USB接口，可以電腦連接一鍵拷貝數(shù)據(jù)。

Built-in storage record running process data, external USB interface, you can connect one-click copy data with computer.

結構描述Structure

1）設備對半開啟；

half open

2）進料端配備高精度質量流量計，準確控制氣體流量，可以實現(xiàn)生產(chǎn)工藝拓展和調整；

The feeding end is equipped with a high-precision mass flow meter to accurately control the gas flow, which can realize the expansion and adjustment of the production process.

3）采用自動化工藝流程，設定好工藝一鍵操作。降低人為因素，工藝可靠性達到99.9%。

Automated process flow is used to set the process for one-button operation. Reduce human factors and achieve a process reliability of 99.9%.

過濾方式Filter

采用多級過濾保護裝置，包括微孔金屬濾網(wǎng)、液氮內嵌式冷凝阱。Multi-level filter protection device including Microporous metal filter ,condensation trap liquid nitrogen  embedded

Plasma系統(tǒng)Plasma system

腔體chamber

內外石英管裝置，可保證真空室管不受污染，且易于清洗。

The inner and outer quartz tube devices ensure that the vacuum chamber tubes are free from contamination and are easy to clean.

內層料管分段升華后各段料容易區(qū)分，能限度的保證產(chǎn)品的純度和產(chǎn)率。

After the inner layer tube is sublimated, the sections are easy to distinguish, which can ensure the purity and yield of the product to the utmost extent.

外管（單端封口）：60/100*1000mm，內管根據(jù)要求定制

Outer tube (single-end sealing): 60/100*1000mm, the inner tube is customized according to requirements

真空系統(tǒng)vacuum unit

采用主管和分子泵直連，確保實驗中高真空要求，真空度可達10 -4Pa

Direct connection with the main tube and molecular pump to ensure high vacuum in the experiment, the vacuum can reach 10 -4Pa

前級泵Fore pump

抽速pumping speed：165L/Min

分子泵Molecular pump    

抽速pumping speed：49L/S（KF40接口）

轉速Rotating speed：81000rpm