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當(dāng)前位置：安徽貝意克設(shè)備技術(shù)有限公司>>卷對(duì)卷石墨烯膜生長(zhǎng)設(shè)備>> 卷對(duì)卷薄膜石墨烯生長(zhǎng)設(shè)備R-T-R、Roll-to-roll film graphene growth equipment
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更新時(shí)間：2023-05-16 08:03:42瀏覽次數(shù)：66次
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卷對(duì)卷熱壓印-電化學(xué)快速鼓泡轉(zhuǎn)移設(shè)備
卷對(duì)卷薄膜石墨烯生長(zhǎng)設(shè)備R-T-R、Roll-to-roll film
卷對(duì)卷連續(xù)化生長(zhǎng)CVD設(shè)備RTR-III-80
卷對(duì)卷連續(xù)生長(zhǎng)PECVD設(shè)備RTR-III-80-PE
主要特點(diǎn)
基于廣大科研界對(duì)實(shí)現(xiàn)大面積單層石墨烯薄膜在工業(yè)銅箔基底上卷對(duì)卷宏量制備的需求,我公司利用一種新型等離子增強(qiáng)卷對(duì)卷連續(xù)快速生長(zhǎng)石墨烯薄膜的方法，設(shè)計(jì)并研制了可達(dá)到中試水平的石墨烯卷對(duì)卷化學(xué)氣相沉積系統(tǒng)，通過(guò)對(duì)石墨烯成核與生長(zhǎng)的調(diào)控實(shí)現(xiàn)高品質(zhì)石墨烯薄膜生長(zhǎng);卷對(duì)卷熱壓印-電化學(xué)快速鼓泡轉(zhuǎn)移方法轉(zhuǎn)移，避免了銅箔刻蝕的常規(guī)轉(zhuǎn)移工藝，實(shí)現(xiàn)了石墨烯從銅箔生長(zhǎng)基底直接向工業(yè)用 PET 柔性透明塑料基底的連續(xù)化無(wú)損轉(zhuǎn)移。
Based on the demａnd for large area single-layer graphene film on the industrial copper foil substrate, we used the method that a new plasma enhanced roll-to-roll makes graphene film continuous and rapid growth, and designed, developed the middle-level graphene roll-to-roll CVD.
By controlling the nucleation and growth of graphene, the growth of high quality graphite thin film is realized, and by roll-to-roll hot pressing, rapid electrochemical bubbling transferring, the copper foil etching is avoided, which realizes the continuous nondestructive transfer of graphene directly from the copper foil growth substrate to the industrial PET flexible transparent plastic substrate。
| Voltage 輸入電源 | ·Furnace input AC 208-240V ，50/60 Hz 輸入電壓 110V/220V 50/60 HZ | ||
| Power 功率 | 6KW | ||
| Working Temperature 工作溫度 | ·Max. Temperature: 1200℃ (< 1 hr) 溫度：1200℃(< 1 hr) ·Continuous working temperature: 1100℃ 持續(xù)工作溫度：1100℃ | ||
| Heating Zone 加熱區(qū) | ·Heating Zone Length: 7.87" ( 200+200+200mm) 加熱區(qū)長(zhǎng)度：7.87”( 200+200+200mm) ·Constant Temperature Zone: 15.74 " (400mm. +/- 1ºC ) 恒溫區(qū)長(zhǎng)度：15.74 " (400mm. +/- 1ºC ) | ||
| Heating Elements 加熱元件 | ·Fe-Cr-Al Alloy doped by Mo 電阻絲（摻鉬鐵鉻鋁合金） | ||
| Processing Tube 爐管 | ·High purity quartz tube: 100 mm OD x 1700 mm Length 石英管：100（外徑）*1700（長(zhǎng)）mm | ||
| Copper foil width 銅箔基底寬度 | ≤80mm | ||
| Copper foil running rate 銅箔前行速度 | 8cm/min---50cm/min 可調(diào) Adjustable | ||
| RF Signal frequency 射頻信號(hào)頻率 | 13.56MHz±0.005%W | ||
| Power output 功率輸出范圍 | 0-500W | ||
| Vacuum Dgree 真空度 | 10-1Pa | ||
| Dimensions 尺寸 | 280*60*130cm | ||
| Warranty 質(zhì)保 | One year limited warranty with lifetime support (Consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.) 一年質(zhì)保終身支持（消耗品如爐管，O型圈不在質(zhì)保范圍內(nèi)） | ||
| Application Note 應(yīng)用 | ·Equipped with high precision mass flowmeter in the gas system,can control the gas flow 氣路系統(tǒng)內(nèi)部裝有高精度質(zhì)量流量計(jì)可準(zhǔn)確的控制氣體流量 ·Gas can mix sufficient in required proportion in the static mixing chamber, 設(shè)靜態(tài)混氣室，有助于氣體充分混合，按要求配比 ·Can match R-T-R laminating & stripping equipment as below: 配套石墨烯卷對(duì)卷覆膜、剝離設(shè)備如下圖
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