| AWM3100V | AWM3150V | AWM3200V | AWM3300V | ||
流量范圍(span) | +200sccm | +30sccm | | +1000sccm | ||
壓力范圍(psi) | | | | | ||
(參照附錄) | | | ±2.0”水柱 | | ||
輸出電壓 | 5VDC@ | 3.4VDC@ | 5VDC@ | 5VDC | ||
@ 標(biāo)定點(diǎn) | 200sccm | 25sccm | 2”水柱 | 1000sccm | ||
零點(diǎn)電壓 | 1.00±0.05VDC | 1.00±0.1VDC | 1.00±0.08mV | 1.00±0.1VDC | ||
零點(diǎn)漂移 | | | | | ||
+25~-25?C | ±25mV | ±100mV | ±25mV | ±25mV | ||
+25~+85?C | | | | | ||
輸出電壓漂移 | | | | | ||
Max | | | | | ||
+25~-25?C | -4% 讀數(shù) | ±5.0% 讀數(shù) | +24.0% 讀數(shù) | -5% 讀數(shù) | ||
+25~+85?C | +4% 讀數(shù) | ±5.0% 讀數(shù) | -24.0% 讀數(shù) | +5% 讀數(shù) | ||
重復(fù)性& 遲滯Max | ±0.5% 讀數(shù) | ± 1% 讀數(shù) | ±0.5% 讀數(shù) | ±1% 讀數(shù) | ||
| Min Typ. | Max. | | |||
電源(VDC) | 8.0 10±0.01 | 15 (2) | | |||
功耗(mW) | 50 | 60 | | |||
反應(yīng)時(shí)間(ms) | 1.0 | 3.0 (1) | | |||
共模壓力(psi) &, lt;, /TD> | | 25 | | |||
工作溫度 | -25~85?C | | | |||
儲(chǔ)存溫度(?C) | -40~90?C | | | |||
沖擊(5drops,6axis) | 100g峰值(5drops,6axis) | | |
2、輸出電壓隨電源電壓而比率變化
3、差壓器件的溫漂主要是由氣體的濃度隨溫度而變化
氣流器件的溫漂主要是薄膜TCR 的系數(shù)的二次根及厚膜電阻的溫飄,加上運(yùn)放的溫飄
4、為防止損壞,zui大允許流量變化值:5.0SLPM/1.0 秒
AWM3000系列
AWM3100V AWM3300V AWM3150V
AWM720P1
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