二維材料生長(zhǎng)CVD系統(tǒng)/Two-dimensional material growth CVD system-安徽貝意克設(shè)備技術(shù)有限公司

主要特點(diǎn)Main features

前端配有預(yù)熱爐，可用于蒸發(fā)固態(tài)源

Equipped with a preheating furnace for evaporating solid state sources

加熱爐選用滑軌爐，可實(shí)現(xiàn)快速升溫/降溫，縮短實(shí)驗(yàn)時(shí)間

Uses a slide furnace to achieve rapid heating/cooling and shorten the experiment time.

法蘭端采用卡箍密封，這樣就使進(jìn)料出料更加的方便。

The flange end is sealed by a clamp, which makes the feeding and discharging more convenient.

進(jìn)氣系統(tǒng)可以按照客戶的實(shí)驗(yàn)需求配置幾路質(zhì)量流量計(jì)，流量計(jì)的量程也可以選擇不同的配置，真空系統(tǒng)也可以根據(jù)客戶的需求選擇配置各種真空泵。

Gas supply system can be configured with several mass flow meters according to the customer's experimental requirements. The flow meter's range can also be selected in different configurations. The vacuum system can also be configured with various vacuum pumps according to customer requirements.

技術(shù)參數(shù)Technical Parameters

Preheating Furnace預(yù)熱爐
Max. Temp	400℃
溫區(qū)長(zhǎng)度zone length	100mm
Heating furnace滑軌爐
Max. Temp	1200℃
Power 功率	2KW (220V)
溫區(qū)長(zhǎng)度zone length	Heating：440mm Constant：200mm
Temperature Controller 控溫方式	lPID automatic control and auto-tune function. 模糊PID控制和自整定調(diào)節(jié) l30 programmable segments for precise thermal processing. 智能化30段可編程控制 lBuilt-in protection for the over-heated and broken thermocouple. 超溫和斷偶報(bào)警功能
Heating Elements 加熱元件	·Resistance wire, Fe-Cr-Al Alloy doped by Mo 電阻絲（摻鉬鐵鉻鋁合金）
Temperature Accuracy 控溫精度	+/- 1℃
Processing tube 爐管	Size：Φ501650mm 尺寸：Φ501650mm
Gas supply system氣路系統(tǒng)
連接頭類型Connector style	雙卡套不銹鋼接頭Double cutting ferrule stainless steel connector
標(biāo)準(zhǔn)量程（N2)Standard range(N2)	50sccm、100sccm、200sccm、500sccm；（可根據(jù)用戶要求定制）optional
準(zhǔn)確度Accuracy	·±1.5%FS
響應(yīng)時(shí)間Response time	Gas characteristics：1～4sec 氣特性 Electrical characteristics:10sec 電特性
線性Linearity	±0.5～1.5%
Working pressure difference range 工作壓差范圍	0.1～0.5MPa
Max. pressure壓力	3MPa
壓力真空表Pressure vacuum gauge	－0.1～0.15 MPa, 0.01 MPa/格
Vacuum unit真空系統(tǒng)
空氣相對(duì)濕度Relative air humidity	≤85%
抽速pumping	10m³/h
真空度vacuum	10-1Pa
容油量Oil capacity	1.1L
轉(zhuǎn)速Rotation rate	1450rpm
噪音Noise	50dB