產品介紹
Z514, Z524 DevicenetTM
Mass Flow Controller / Meter
Mass flow controller model *1 SEC-Z514KX SEC-Z514MGX SEC-Z524MGXN SEC-Z524MGX
Mass flow meter model *1 SEF-Z514KX SEF-Z514MGX SEF-Z524MGXN SEF-
產品介紹
Z514, Z524 DevicenetTM
Mass Flow Controller / Meter
Mass flow controller model *1 SEC-Z514KX SEC-Z514MGX SEC-Z524MGXN SEC-Z524MGX
Mass flow meter model *1 SEF-Z514KX SEF-Z514MGX SEF-Z524MGXN SEF-Z524MGX
Full-scale flow rate MR/MG number
(N2 conversion flow rate) #R01:10SCCM
#R1.5:17.5SCCM
#01:30SCCM
#1.5:55SCCM
#02:100SCCM
#2.5:175SCCM
#03:300SCCM
#3.5:550SCCM
#04:1SLM
#4.5:1.75SLM
#05:3SLM
#5.5:5.5SLM
#06:10SLM
Valve Type
Flow rate at fully closed control valve
Flow rate control range
Flow rate measuring range (SEF)
Operating temperature
Response
Linearity
Repeatability
50 to 300 kPa (d)
#5.5, #06: 100 to 300 kPa (d)
Operating differential pressure (SEF)
