產(chǎn)品介紹
Z512, Z522 Digital / Analog
Mass Flow Controller / Meter
SEC-Z512MGX SEC-Z522MGXN SEC-Z522MGX
SEC-Z512X SEC-Z522XN SEC-Z522X
SEF-Z512MGX SEF-Z522MGXN SEF-Z522MGX
SEF-Z512X SEF-Z522XN SEF-Z522X
Full-scale flow rate MR/MG number
(N2 conversion flow rate) #R01:10SCCM
#R1.5:17.5SCCM
#01:30SCCM
#1.5:55SCCM
#02:100SCCM
#2.5:175SCCM
#03:300SCCM
#3.5:550SCCM
#04:1SLM
#4.5:1.75SLM
#05:3SLM
#5.5:5.5SLM
#06:10SLM
Valve Type
Flow rate at fully closed control valve
Flow rate control range
Flow rate measuring range (SEF)
Operating temperature
Response
Linearity
Repeatability
50 to 300 kPa (d)
#5.5, #06: 100 to 300 kPa (d)
Operating differential pressure (SEF)
MAX. Operating pressure
Pressure resistance
Leak Integrity
Flow rate setting signal