主要特性與技術(shù)指標(biāo)
廣泛的工作條件與精密測量功能相結(jié)合
適合功率器件表征的綜合解決方案，高達(dá) 1500 A 和 10 kV
中等電流測量和高電壓偏置（例如，500 mA，1200 V）
μΩ 導(dǎo)通電阻測量功能
高電壓偏置時，可進(jìn)行精確的 sub-pA 電平電流測量
在 -50 ℃ 至 +250 ℃ 溫度范圍內(nèi)進(jìn)行全自動熱測試
廣泛的器件測量功能
可在高達(dá) 3000 V 直流偏置時執(zhí)行全自動電容測量（Ciss、Coss、Crss 等）
10 μs 高功率脈沖測量
封裝器件和晶圓上 IGBT/FET 柵極電荷測量
高電壓/強電流快速切換選件，適用于 GaN 電流崩塌效應(yīng)表征
多達(dá) 5 個高電壓（3 kV）電源/測量通道，提供的靈活性
通過互鎖測試夾具執(zhí)行安全的與溫度相關(guān)的測試
改進(jìn)的測量效率
在高電壓和強電流測量之間自動切換，無需重新布線
自動測試電路形成，可用于封裝器件和晶圓上器件的晶體管結(jié)電容（Ciss、Coss、Crss、Cgs、Cgd、Cds 等）測量
具有互鎖機(jī)制的標(biāo)準(zhǔn)測試夾具，可進(jìn)行封裝功率器件測試
支持高達(dá) 200 A 和 10 kV 的高功率晶圓上測試
示波器視圖支持對應(yīng)用電壓和電流波形的驗證
MS Windows EasyEXPERT 軟件簡化了數(shù)據(jù)管理和分析流程
Main features and technical indicators
A wide range of working conditions combined with precision measurement functions
Integrated solution for power device characterization up to 1500 A and 10 kV
Medium current measurement and high voltage offset (e.g., 500 mA, 1200 V)
Mu Ω conduction resistance measurement function
Accurate sub-pa level current measurements are performed at high voltage bias
In - 50 ℃ to + 250 ℃ temperature range for automatic test
Wide range of device measurement functions
Automatic capacitance measurement (Ciss, Coss, Crss, etc.) can be performed at dc bias up to 3000 V.
10 s high power pulse measurement
Gate charge measurement of IGBT/FET on packaged devices and wafers
High voltage/strong current fast switching option, suitable for GaN current collapse effect characterization
Up to 5 high voltage (3 kV) power/measurement channels, providing maximum flexibility
Perform safe temperature related tests with interlock test fixtures
Improved measurement efficiency
Automatic switching between high voltage and high current measurements without rewiring
Automatic test circuit is formed, which can be used for measuring transistor junction capacitance (Ciss, Coss, Crss, Cgs, Cgd, Cds, etc.) of packaged devices and devices on wafer
Standard test fixture with interlocking mechanism for testing packaged power devices
Support up to 200 A and 10 kV high power wafer test
The oscilloscope view supports verification of application voltage and current waveforms
MS Windows EasyEXPERT software simplifies the data management and analysis process
