MS767的基礎(chǔ)組成是硅微機(jī)加工膜和真空安裝下的耐熱玻璃。植入的電阻利用壓阻效應(yīng)感知膜的變形。MS767作為絕壓傳感器在膜下有密封真空參考腔。
由于傳感器的基礎(chǔ)元素是擴(kuò)散電阻，地(GND1,GND2)上的電壓必須低于電壓腳（Vs+)上的電壓。擴(kuò)散層連接到Vs+。
MS767有個(gè)敏感膜（0.5x0.5mm)，傳感器外直徑是1.62x1.48mm。 吸取和放置工具應(yīng)該為軟材料如橡皮（硬度78-97 Shore A). 它的外部尺寸必須符合傳感器。 真空腔要和膜一樣大。
全壓力范圍
| kPa | bar | mbar | PSI | atm | mm Hg | m H2O | Inches H2O |
| 700 | 7 | 7000 | 102 | 6.9 | 5250 | 71 | 2810 |
比率
| 參數(shù) | 符號(hào) | 條件 | 最小 | 單位 | |
| 供應(yīng)電壓 | VS+ | Ta = 25℃ | 20 | V | |
| 存儲(chǔ)溫度 | Ts | -40 | +150 | ℃ | |
| 過(guò)壓 | 21 | Bar |
電氣特性
(Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25℃ )
| 參數(shù) | 最小 | 典型 | 單位 | 備注 | |
| 工作壓力范圍 | 0 | 7 | Bar | ||
| 工作溫度范圍 | -40 | 125 | ℃ | ||
| 橋路電阻 | 3.0 | 3.4 | 3.8 | KΩ | |
| Full-scale span (FS) | 322 | 392 | 462 | mV | |
| Zero Pressure Offset | -40 | 0 | 40 | mV | |
| 線性 | ±0.15 | ±0.4 | % FS | 1 | |
電阻溫度系數(shù) TCR 滿量程溫度系數(shù) TCS 零點(diǎn)溫度系數(shù) TCO | + 2400 - 1500 - 80 | + 2800 - 1900
| + 3300 - 2300 + 80 | ppm/℃ ppm/℃ μV/℃ | 2 |
| 壓力遲滯 | ±0.05 | ±0.15 | % FS | 3 | |
| 重復(fù)性 | ±0.1 | ±0.2 | % FS | 4 | |
| 溫度遲滯 | 0.3 % | FS | 4 |
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range (0 to 7 bar).
2) Slope of the endpoint straight line from 25℃ to 60℃.
3) Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25℃.
4) Same as 3) after 10 pressure cycles
5) Maximum difference in offset after one thermal cycle from -40℃ to +125℃.
訂購(gòu)信息
| 產(chǎn)品 | 產(chǎn)品描述 | 編號(hào) |
| MS767A-0.5 | 700 kPa Absolute Pressure Sensor with PyrexTM0.5 mm thick (standard) | 76710025 |
| MS767A-0.2 | 700 kPa Absolute Pressure Sensor with PyrexTM0.2 mm thick | 76710022 |
The MS767 dice are supplied sawn on blue foil, mounted on plastic rings
