EL-FLOW METAL SEALED F-201CM
Metal Sealed Mass Flow Controller for Gases
- Patented metal-to-metal seal construction ensures long-term leak tightness (to atmosphere)
- Electropolished wetted parts
- Cleanroom asembled
- High accuracy, excellent repeatability
- Multi Gas / Multi Range functionality (option)
- Fast settling time (down to 600 msec)
Metal Sealed Gas Mass Flow Controllers
Bronkhorst® model F-201CM Mass Flow Controllers (MFCs) designed especially to meet the requirements of the semicon market as well as other high purity gas applications. The instruments feature high surface quality and are of modular construction with metal-to-metal seals that ensure long-term leak tightness. The F-201CM is suited for precise measurement and control of flow ranges between 0.12…6 sccm up to 1…50 slm (based on N2) at operating pressures between vacuum and 1000 psig (64 bar).
EL-FLOW® Metal Sealed series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide DeviceNet™, PROFIBUS DP, Modbus, EtherCAT®, PROFINET or FLOW-BUS protocols. The EL-FLOW® Metal Sealed design features optional Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.
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