日本YAMATO大氣壓等離子清洗機APPC-400Y :
| Plasma apparatus-(Atmosphericpressure plasma cleaner) |
APPC-400Y |
| System Outline | |
ThisEquipment is Atmosphere Plasma for cleaningsamplesurface.
Easy to make In-Line system with otherEquipment.UnifyandSeparation Type available, Also, Two kindsofElectronics(Insertion and Spout) type available. |
| Feature | |
- Does not need Vacuum systemsuchasVacuum pump and Vacuum chamber.
- Reaction gas use He,Ar andO2mixinggas for cleaning sample surface.
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| Sample |
| Sanplesize : Any size okay(W) x 45(D) x Max. 15(T)mm |
| Equipment Function |
Loading Sample - Useing conveyor or Armchuckforloading sample
- Sample are continuanceloadingtoelectrode.
- Un-load sample.
- Go to next process
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- Automatic andManualoperationselectable.
- Touch panel operation
- Two Electrode can build inforheavydirt cleaning of sample surface.
- Easy to install and easytomakeIn-Line system.
- Electrode and Main unitcanbeseparately. Also, One controller cancontrolTwoElectrode.
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| ExternalDimension | Systemstructure |
- Unify type : W800 xL700xH1200mm
- Separately type : W800 xL700xH950mm
| - Electrode unit
- RF generator unit (Inthecontrolunit)
- Gas flow unit (Inthecontrolunit)
- Touch panel (On controlunit)
- Cooling unit (Option)
- Loading andUn-loadingunit(Option)
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| Electrodeunit | Gasflowunit |
Two parallel flat plate.
Gas input hole for fill up mixing gas (He and Ar).
Also, water cooling port. (IN and OUT) | Mass flow controller system - Ar : Max. 5L/min
- He : Max. 5L/min
- Oxygen : Max. 200mL/min
|
Electrode spec. - Electrode : Aluminum Up to W300xL50x H20mm Water Cooling type.
- Around electrode matirial:Quartzglass
|
| Controlunit | Powersupply |
Touch panelandprogrammablecontroller (PLC) 1. Set process recip
 Gas flow
RF power
oading speed (Conveyorspeedetc.) 2. Process monitor
Gas flow, RF power
Error
| 3 phase AC220V 25A |
| Safetymechanism |
- This Equipment builtinsafetyfunction system.
- Builit in safetycoverforElectrode
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