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歐戟進口HERVIEU全系列EP3BA100-28L

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歐戟進口HERVIEU全系列EP3BA100-28L
上海歐戟貿(mào)易有限公司
歐戟控制設(shè)備(上海)有限公司是歐美備件服務(wù)供應(yīng)商。歐戟優(yōu)勢供應(yīng)德國工控產(chǎn)品。只要是德國及歐洲的產(chǎn)品,只需您提供產(chǎn)品的名稱、型號及規(guī)格,我們都能在德國為您買到,并送貨到您手上,低價優(yōu)購。

歐戟進口HERVIEU全系列EP3BA100-28L

歐戟進口HERVIEU全系列EP3BA100-28L

上海歐戟貿(mào)易有限公司

歐戟控制設(shè)備(上海)有限公司是歐美備件服務(wù)供應(yīng)商。專注于進口機電設(shè)備、儀器儀表等進口設(shè)備。

我們的客戶來自汽車(一汽大眾、一汽解放、北京奔馳、奇瑞),汽車下游(大陸汽車、卡斯馬、華域、麥格納),鋼鐵(武漢鋼鐵、山西太鋼、寶鋼),食品(百威、旺旺),能源(中石化、中石油)等多個行業(yè)。

公司總部位于德國法蘭克福,美國芝加哥和中國上海設(shè)立分部,可直接與德國、法國、意大利瑞士等千余家廠家進行高效快捷的溝通合作。

美國Progress Chemical Inc.化學制劑中國區(qū)代理

 

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傳感器HBM、BaumerKIMO、GEKistler、LorenzSenoTec

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夾具模具Zimmer、Schunk、OTT、PHDrobohand、Berg、Rud

儀器儀表Wika、JumoGMC、PhoenixGOSSEN、Warmbier

電氣元件Siemens、B&R、Vipa、Puls、Murr

 

上海歐戟貿(mào)易有限公司

歐戟控制設(shè)備(上海)有限公司是歐美備件服務(wù)供應(yīng)商。歐戟優(yōu)勢供應(yīng)德國工控產(chǎn)品。只要是德國及歐洲的產(chǎn)品,只需您提供產(chǎn)品的名稱、型號及規(guī)格,我們都能在德國為您買到,并送貨到您手上,低價優(yōu)購。

 

HERVIEUEP3BA100-28L
HonsbergMR-010GM004
HonsbergWO1-025GK
HonsbergWO1-040GK
Fibro246.5.016.012
HOMMEL051208
HOMMEL10025091
HOMMEL10053157
HOMMEL230480
HOMMEL231498
FlowLine1SPST
FlowLineLHJ30-S301
parkerPGP517B0580CM1H3NP5P3S
HELU505386 GWV-3-3001
VISHAYPhMKP 415.1.10.00
PHDQU299791
PHDQU299792
ROEMHELD1294-10-0110
ROEMHELD1294-10-0200
ROEMHELD1545-110
ROEMHELD1548-185
ROEMHELD1549-105
HBE42/55.55-55 GG
Tasteinsatz80.362.00
IMCFA-RUN 1010090
IMCimc-DONGLE 1010111
IBZcSLSi-24-75
IBZSG2
IBZUSI, USB-Seriell-Interface
Fibro237.1.0300.250
GERWAHDBK/DK7/66-12H7-12H7-3NM-C-A
Elan Schaltelemente GmbH & Co. KGNIR 10.100 Best.-Nr. : 2285611 /1015119
Elan Schaltelemente GmbH & Co. KGNIR 15.250 Best.-Nr. : 2286533 /1012229
Elan Schaltelemente GmbH & Co. KGNIR 30.100 Best.-Nr. : 2285644 /1012144
Elan Schaltelemente GmbH & Co. KGNTR 60.125 Best.-Nr. : 2292653 /1012390
Elan Schaltelemente GmbH & Co. KGNTRN 12.6 / 250 C Best.-Nr. : 2080322 /1011679
Elan Schaltelemente GmbH & Co. KGNTRN 12.8 / 200 B Best.-Nr. : 2080244 /1011667
ABBTZIDC V18345-2010160001
ELCOPAMM58C10-BF6XXR-H001 4096
FrabaOCD-DPB1B-1212-CA30-OCC
HAMMELMANN01.01170.0017
HAMMELMANN04.00739.0051
HommelWerke10043782
HommelWerke10054119
HommelWerke537855
HommelWerkeARMAZZ55MM M0435041
HommelWerkeTKU300/600 233381
HommelWerkeTS1TKE590GDT35D 10044584
FuchsTKFA05
FuchsTKFSF08
SERTGB861
KROMSCHROEDERVSBV25R4-4Z 165~330MBAR
Leuze50115049 K-DS M12A-MA-5P-3m-S-PUR
TelemecaniqueXPSATE5110
CFW200/230X15 B2U
doceram1111-ZK-10523
doceram1111-ZK-13003
doceram8440-ZK-13003
KSBKSB BOA-Compact Absperrventil DN50 BOA-C NG PN 16 DN 50 JL-1040
Bremer1014923 NTA 5.20.42 S
BremerAluminium-Mehrfach-Nutenleisten L=200mm
BremerAluminium-Mehrfach-Nutenleisten L=200mm
BremerInitiator Nocke NI 25
BremerInitiator Nocke NI 25
BremerInitiator NTA 5.20 s
BremerInitiator NTA 5.20 s
BremerInitiator NTZ 200 s
BremerInitiator NTZ 200 s
BremerNI 100 Initiator-Nocken H= 12,5mm
BremerNI 100 Initiator-Nocken H= 12,5mm
BremerNI 40 Initiator Nocke H= 12,5 mm
BremerNI 40 Initiator Nocke H= 12,5 mm
BremerNLA 12.1/320B
BremerNLA 12.1/320B
BremerNLA 12.2/320 SLOT_STRIP
BremerNLA 12.2/320 SLOT_STRIP
BremerNLA 12.2/320B SLOT_STRIP
BremerNLA 16.1/200 SLOT_STRIP
BremerNLA 16.1/200 SLOT_STRIP
BremerNLA 16.1/250 SLOT_STRIP
BremerNLA 16.1/250 SLOT_STRIP
BremerNT 16.40 S SOLID_STEEL_CAM
BremerNT 16.40 S SOLID_STEEL_CAM
BremerNTZ 200.42 S COMPOSITE_CAM
BremerNTZ 200.42 S COMPOSITE_CAM
BremerNTZ 50 S
BremerVollstahl-Nocken H=16mm incl. 2 Nutenst.
BremerVollstahl-Nocken H=16mm incl. 2 Nutenst.
BAUERBS06-64U/DV04LA4-ST
EUROFORKCATFLY122-2
EUROFORKCATFLY122-2
Eisele9X12 BLAU PUR
HENNIGx.1015.3634
Grutzner GmbH290.1002 Connector
Grutzner GmbH290.1002 Connector
Grutzner GmbH290.1040 Connector
Grutzner GmbH290.1040 Connector
Grutzner GmbH290.1041 Connector
Grutzner GmbH290.1041 Connector
Grutzner GmbH290.1045 Connector
Grutzner GmbH290.1045 Connector
Grutzner GmbH290.1046 Connector
Grutzner GmbH290.1046 Connector
Grutzner GmbH290.2035 Connector
Grutzner GmbH290.2035 Connector
Grutzner GmbHSL01-60
Grutzner GmbHSL14-125 LUBRICATOR
Grutzner GmbHSL14-125 LUBRICATOR
DOLDAC380V 25A 1a1b M/N:BA9034N
kistler2151B30154002
kistler4740AWY2X0B0
kistlerKSM036430
kistlerKSM038461-15
kistlerKSM307390-15
kistlerKSM313720-15
WEG3-132S-02 20MAR08 1000878279
VERSAKSG-4232-HCC-A240
parkerVB606C
SeraC 409.2-140e Nr.WP351486+Connection rod
SeraC 410.2-510e Nr.WP318911+Connection rod
Würth0731100
Würth890100048
Würth8901003
Würth890321
Würth890323
Würth893243050
Würth893449
VickersFCV6-16V-S-O-NV
GECR453AB3ABB N202! FLA25 RES:35
Sauter-Cumulus GmbHDFC17B59F001
Sauter-Cumulus GmbHDFC17B76F001,0-10bar
Sauter-Cumulus GmbHDSB 158 F001
DALSACR-GEN0-C1400 S1003594
SteinelSZ8066.2.075*200
tuenkersT6-04P
StueweIS1 120x165
StueweIS4 120x165
StueweIS4 80x120
SMWID.:087414,
Weidmuller1939440000
Weidmuller1939450000
Weidmuller1939460000
WeidmullerRC1374AC4 24VDC
WeidmullerSRC-12CO
SIEMENS3RH2911-1HA11
SIEMENS3RT2027-1AP00
SIEMENS3ZX1012-0RH21-1AA1
SIEMENS6EP1437-3BA10
SIEMENS6ES7 131-4BF00-0AA0
SIEMENS6ES7 132-4BD32-0AA0
SIEMENS6ES7 132-4BF00-0AA0
SIEMENS6ES7 138-4CA01-0AA0
SIEMENS6ES7 138-4FA05-0AB0
SIEMENS6ES7 138-4FB04-0AB0
SIEMENS6ES7 972-0AA02-0XA0
parkerBOX QTY PAE-AR1050
Berger LahrBDM4564S0115 Nr.2405013595
SAUTERDSD152 F001
YUKENDSG-01-3C60-A240-N1-50
Oil Control08453503733500C;AVBSOSECCAP42
heidenhainROD436 1024 30B10-2B,ID :376 835-01
schmalzHTR UNI 2N G2 140
schmalzHTR UNI 2N G2 80
schmalzHTR-UNI 2N G2 80
schmalzHTR-UNI 2N G2 80
schmalzSAB 60 NBR 60 G1/4-IG
schmalzSAB 60 NBR-60
schmalzSAB 80 NBR-60 G1/4-IG
schmalzSAB60 NBR-60 G1/4-1G
schmalzSAB80 NBR-60 G1/4-IG
schmalzSAOB 60x30 NBR-60 G1/4-IG
schmalzSAOB-80X40-NBR-60-G1-4-IG
schmalzSAOB-80X40-NBR-60-G1-4-IG
schmalzSAOF40*80
schmalzSAOF40x80
schmalzSCP-25 NO-FS RP-VD
schmalzSMP 25 NC AS VD
wampflerplz see the pic,we need Accessories 1&2
GROSCHOPPIGK80-40B IP54 3PH 66W 1320rpm Nr.8560787
GROSCHOPPZ841
KRACHTPUAG KF12RF1-D15
ELANDPN55SW
StarrettAVR300-M3
WIKUS641 5300*41*1.3(mm) 2/3
VSEef 2 lcd
TecsisS1100B074812
hydacHDA3840-A-350-Y24(10M)
hydacHDA3840-A-400-124 (15M)
DELTACTM-100
VEGAPS68.XXEFEHHAMXX
RexrothR900537344
RexrothR900702060
TIMMER53508060
TIMMER53508065
TIMMER53508069
TIMMER53508144
TIMMER53508166
MasterflexDN100 60KPa 150 (5m)
MasterflexDN65 60KPa 150 (12m)
SirenaS10EU
heidenhain376 886-4K
TWKSWF10B-01
ALLEN BRADLEYSQ2
SCHUNK450300
DruckDPI104,0-20BAR
SERVOMECHATL63 RV2 C300TS V6 nr.10.1871.08695
SERVOMECHTF100B4CA NM70 IE2 Nr.A48788357
VIBRO-METERSER:AA44254 PNR:204-100-000-012 2/0/0/1/1
Rexroth0811404601
KRACHTKF25RF27
Rexroth0532001011
SANKYOSOBW10
SamtecEQCD-040-40.00-TTL-TTL-1-S
SamtecQSE-040-01-L-D-A
Rexroth2FRE 10-44/16LBK4M
INA3806-2RS1
SELCOMMR320 CD190 3R
unitecUN/PRF100
TR-Electronic GmbHCEW65M-10146 CEW65M SSI
BARCOBC-54065-24-50
KUSOMRR 30 30X1,5
KUSOMRR 35 35X1,5
SIEBERTS102-W6/14/0R-000/0B-TM A/N 0215392
INAIR 130X145X35
INAIR 75X85X54 C2
INAKR 32 PP
INAKRE 32 PP
INANK 80/25
INARNA 6915 C2
Rexroth4WE 6 D7X/OFHG24N9K4 R901130746
ELAPRE62110005R9,52LD No:01034815090649
RexrothMANASSYAGA16970 R978052100
SCHMERSALG50-035-Z22/22Y-M20
SIKO16-30-1-E-XX
SIKODA10-1034 320
SIKOSDP-10FL-3B
ASSMANNA-DFF09LPIII/Z black
GEMU865 10D 72214 115 160
Schneider Electric GmbHMC-4/../10/...
SOMATECPRVA-8NT 1405001102
weishauptG11/1-D
weishauptW-ZG02/2,100%ED,T60℃,230V50HZ,90VA
MayTecMA14.10-4/7
spiroflux30232300
TEKAAIRFILTER MINI, type HD 220-240 Volt, 50/60 Hz Prod.No:94100
Gemue695 40D603441
Selcom Elettronica90601 6430 1 AC
Tesa52330
ELAUE-MO-113 15M
GEMU695 40D6034 41 1500 PS 10.0 bar PST 5.5-7.0 bar
RexrothVT VSPA2
RexrothVT3002-1-2X/48F
RexrothVT3002-2X/32D
RexrothVT-3002-2X/48F
DINSESAS100
heidenhain528100-53
SIEMENS1LA7090-2AA10-Z-1.5-2860-B3
SIEMENS1LA7133-6AA10-4KW/950min
SMABCH control board RE168-11
REERMLR 2B 8013007
KAUTT BUX15A125V AC 23SR83
trumpf0134336
trumpf0915755
trumpf0935126
trumpf0948583
trumpf1237260
trumpf1264725
trumpf1290397
trumpf1313254
trumpf1340186
trumpf1381492
trumpf1484014
trumpf1497756
trumpf1525321
trumpf1811787
ABBHAGG301141P0001
ABBHAMT304080R0051
ABBHATM304094R0001
ABBHATM405405R0002
ABBHATM405406R0004
ABBHATM405406R0005
S.T.M.AT71C4 , Nr.07011898042
WemaroPRIDE 5x8x16(35)x80 1F
TSV7-01137E
WEBTECTP125-BU-USA-1887
TERXP6011.5/2.8MA
TERXP6011/2.5MA
KRACHTKF 0/1 S10K POA ODL32/107
VATAngle valve 24444-QE44-0001 (DN160, stainless steel, ISO-K, position indicator, with DC24V solenoid valve)
VATBolt 32044-QNSU-0001
VATButterfly valve 61246-PECP (DN200, stainless steel, ISO-F, DeviceNet communication, you can take a sensor)
VATC-clamp 32036-QNKS-0001
VATCentral ring 32044-QAZV-0001
VATCentral ring 32046-QAZV-0001
TSAM53R2D/4
ETELIMTHP108-111-000
hydacEDS 3446-3-0400-000
RIDGID3/4-2 58890
DISATYPE:RBC-1503 Nr.10410228
lechler060.020.1C.00.1.4301
lechler060.020.1C.01,1.4301
lechler064.400.11.1.1.4104
lechler069.400.11,1.4104
lechler069.411-1C-10.00.1,1.4301
lechler06P.350.1Y
lechler06P.460.1Y.00.00.0
lechler6P3.726.27
lechler6P3.808.27
lechler6P4.766.27
lechler6P4.806.27
lechlerSM3,AV-060.020.1C.28.00.0,1.4301
lechlerSM4.006.941-1C-10.00.1.1.4301
KleintgesKEST1000 ART B576239-01 EN61558-2-2
Thomas & BettsPB316A
kistler4045A10
kistler4603B10
kistler4761B5
PMACI45-115-21000-000
KnickP27000H1-S001
BALLUFFBTL5-E10-M0125-K-SR32
BALLUFFBTL5-H114-M0250-B-S94
BALLUFFBTL5-H114-M0500-B-S94
MobreyControl unit MCU201,for wall mounting
MobreyUltrasonic gap sensor 402SD8GH with 3 m of screened cable according to marine requirements
MobreyUltrasonic gap sensor 402SD8GH with 3 m of screened cable according to marine requirements
EltraEH30M512S8/24P6X3PR
MADERVZ150-90 TB HS MICRO
TurckTS-400-LI2UPN8X-H1141
ODU656-521-012-001-002
maxvalcoAG1-SDT DN125
maxvalcoAG1-SDT DN150
maxvalcoAG1-SDT DN200
maxvalcoAG1-SDT DN250
maxvalcoAG1-SDT DN40
maxvalcoAG1-SDT DN65
maxvalcoAG1-SDT DN80
TurckFCS-G1/2/A4-AP8X-H1141(24VDC 400MA 1-300CM/S)
RotronicAC1123
RotronicAC5002
RotronicEA35-SCS
RotronicER-15
RotronicHC2-IE305
RotronicHF562-WB1XDHXX
RotronicHP22-A
RotronicSP-S15
THOMMENHM22 0-20-200mbar
PILZ773400
PILZ773732
PILZP2HZ X3 24VDC 2n/o 1n/c Nr.774350
MEASUS381-000002-001BG
EMGSV1-10/16/050/6/EX NO:2174176
ABpanelview plus 1000
KEYENCELXD/GB3-A1EL
Pavone Sistemi S.r.l.DSK 113, 100KG, 1.5mV/V, SN:201202542
Nordson1034042
Nordson1123925
Nordson1123929
Nordson136537
Nordson272549
Nordson394104
Nordson394105
Nordson394122
Nordson7131840
Nordson7136920
Nordson7140583
PCB PIEZOTRONICSModel:356B21 , SN:LW180773 (x axis)
Kappa0.000.71.503.70 Pressure switch 0185-460-03-1-003 / 50-200, equipment number: 0330317 (ZE400)
SensopartC-MOUNT LO C 50
SensopartLFR115 WD-24-2L1
SensopartMA LR-100/112
SensopartMK 45 L
SensopartV20-OB-A2-W12 536-91011
COGNEXMODEL DM8500 ID 825-0137-1R
AlcoPS3-A6S
AlcoPS3-B6S
AlcoPS3-W1S
AlcoPS3-W6S
PMAHC310/2 Nr.9404-799-84006
SUNTEC150303 J7C0C10014P
ProsensorPTD25-20-0100WCH
noricangroupBlast-whee-lU105;595-016-592
MeusburgerH4062/796/1496
Qualitrol20860E
MESSKOMTraB DB100-B
MESSKOMTraB DB100T-B
VEGAPS68.XXEFEHHAMXX
LORENZBIW4117A
LORENZK-25-200
LORENZK-25-500
Kistler Instrumente GmbH2151B30154002
Kistler Instrumente GmbH4740AWY2X0B0
Kistler Instrumente GmbHKSM036430
Kistler Instrumente GmbHKSM038461-15
Kistler Instrumente GmbHKSM307390-15
Kistler Instrumente GmbHKSM313720-15
norelem05080-01
RelecoC3-A39 X 24VAC
KongsbergPT100 MB286T125U+MN531-75B34
ELCOEC40B6-P4AR-500
ELCON30D130/A
ELCON40E155/A
ELCON50F3440/A
ELCOTMSP1612F-CN001-0003
MOOG GmbHD663-4002
IFMIG-3005-BPKG
IFMIY5033
IFMIY5051
leisterhotwind S 230V 50/60Hz 16A 3700W
Rexnord24 -DD5302-02
Rexnord24 -GC5040-02
Rexnord24 -GD5300
Rexnord30 -GC5300-02
Rexnord30 -GC5302-02
Rexnord36 -GD5300-02
Rexnord36 -GD5302-02
RexnordE6 -RET-30
RexnordE6 -RET-36
ENDINEPRO025IF-1B
ENDINEPRO25MF-1B
ROLLONTelescop rail DSS28-690
DT3301 EU22
TurckNI15-M30-AP6×/S120
LEISTRITZL3HF-100/200 116327-002
BONDIOLI & PAVESIHPLMA208SNMG4G4RVB 2170496
POCLAINP.Nr:7018180151
OptoconFOTEMP4 EGK0028
OptoconTS2 ESF0039
Manner21526
RTKST5143-15
PremaDN15 TYP:PQVI-POM M.T.1(NR)max.80 C PN 6bar
PMACI45-115-21000-000
Murr7000-12221-2240300
Birkenbeul6APE90S-4 Nr 1079079,pls see the pic
ELANSTW-SLN0052KL5-778lg-1022996
norelem Normelemente KG26106-02502055
norelem Normelemente KG26106-02503055
NEIDLEINSK 2998-127
BD sensorDMP 343-100-6000-1-3-100-300-1-000
PANJITP4SMA6.8
Matador0188 1618
KukaB00970-44-10(351722)
KukaC02135-94-053InlineLSC
KukaC02135-94-053LSC(351717)
KukaD02136-28-04-00(351720)
KukaD02136-28-04-Inline
OMEGALVN-50
mks275806-EU
mks390410-0-YE-T
Lafert GmbHB7116P-03178
binderModel :E7A-C10000-1MA200-D1104501-21BS2410
ROSSI3FO-80L-6-B5 1.1KW
ROSSIMRIV 100UO 2A403 P1:1.1KW;P2:5.63min
Motor PowerSKA.C.55.HM.550.16.3850.00.507.01,pls see the pic
BD sensorDMK331P 505-1003-1-5-100-Z00-1-1-1-200
LovatoRF381400
BERNSTEINKIB-T30PP/010-KLSD,10-60VDC,200mm
LONNENr.3334671
LONNENr.6106822
TelemecaniqueXCS EN/IEC 60947-5-1
LISMARP9707
MewestaWSM08139D-01-C-N
MENZEL23-SP-011-412-1
MENZELMS MV 3/2 A
BALLUFFBTL5-S112-M0250-B-S32
MagtrolVM6
Elobau5712711AA
SCHMERSALG50-035-Z22/22Y-M20
PS Automation GmbHPSQ202MA-AMTAC220V250NM28S/90°4-20mAIP6792W
NumaticS0L0Y010/05SC08
MecairMTS16 AC220V 50HZ
ASSMANNA-DFF09LPIII/Z black
Renishaw14H964
OSBORN9906 022 032
Niles-Simmons69.79001.00011
OMRONE6F-AG5C-C
OMRONH8PS-8BP
GraessnerP140 FL-2/1-13-B5-160/130/110
GraessnerP140FL-2/1-13-B5-160/130/110
GraessnerP170 FL-1.5/1-13-B5-250/216/180
RUDVAK-4-6 NR.7100742
RUDVCGH6 NR.7100498
RUDVIP-6mm*4m,1.5T NR.7100477
EMGKLW225012
SICODI/XM5-1024-1230-BZ-C-CL-R;7027088 9 07/07
PANJITP4SMA6.8
Radio-EnergieTYP:RE.0444 R1B 0.06 EG N.A60375192
3M100V
POMPETRAVAINITCT 40-200/1-R/A3-T Inverter: adjustable (0 – 50 Hz)Electric protection: ATEX II 2 Gc IIB T4
klueberMFE2-F150-2000+299
klueberMFE2-KW3F-2+299
KNORR-BREMSEK019342V01
maxon200SMA11-BA11-CC21AO
Lumberg0910-ASL-408S ADDR.3456
LESER4593.2513-1.7BAR
reumullerET -90Sa.23-ET902000327,1.5KW,230/400V,6.4/3.7A,IP55,F,2850r/min,B5,△/Y,S1
SUPERBOLTSJ M100X6/W
BERNSTEIN1-UIZW D-32457 10A 500V
ROFIN120201506
MoellerAT4/11-S/I/H
Matador0188 1618
Rose+KriegerKlemmstück, Kreuzklemmstück K 40, Rose+Krieger, 504000000300, Aluminiumlegierung
Rose+KriegerKlemmstück, Kreuzklemmstück KVR 40, Rose+Krieger, 504000040300, Aluminiumlegieru
POMTAVA11192F/A/3.0/J/T1/O
PISCOJSC3/8-03A
EMGKLW225012
P+FNJ2-12GM40-E2-V1-Y37715
Numatics553SS43A6G00040
steuteZS 71 2O W 71.5.42.9.06

 

隨著單片集成電路從小、中規(guī)模發(fā)展到大規(guī)模、超大規(guī)模集成電路,平面工藝技術(shù)也隨之得到發(fā)展。例如,擴散摻雜改用離子注入摻雜工藝;紫外光常規(guī)光刻發(fā)展到一整套微細加工技術(shù),如采用電子束曝光制版、等離子刻蝕、反應(yīng)離子銑等;外延生長又采用超高真空分子束外延技術(shù);采用化學汽相淀積工藝制造多晶硅、二氧化硅和表面鈍化薄膜;互連細線除采用鋁或金以外,還采用了化學汽相淀積重摻雜多晶硅薄膜和貴金屬硅化物薄膜,以及多層互連結(jié)構(gòu)等工藝。

 

 

 

 

  單片集成電路是獨立實現(xiàn)單元電路功能,不需外接元器件的集成電路。要實現(xiàn)單片集成,需要解決一些不易微小型化的電阻、電容元件和功率器件的集成,以及各元件在電路性能上互相隔離的問題。

  2.薄膜集成電路工藝

  整個電路的晶體管、二極管、電阻、電容和電感等元件及其間的互連線,全部用厚度在1微米以下的金屬、半導(dǎo)體、金屬氧化物、多種金屬混合相、合金或絕緣介質(zhì)薄膜,并通過真空蒸發(fā)工藝、濺射工藝和電鍍等工藝重疊構(gòu)成。用這種工藝制成的集成電路稱薄膜集成電路。主要工藝:

薄膜集成電路

薄膜集成電路

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