流量計(jì)FC-2900M 

FC-2900/FC-2920/FC-2925/           
Mass FlowControllers and Flowmeters
 Mass Flowmeters Card Edge FM-3900 (10 sccm - 10 slpm) FM-3910 (100 sccm - 30 slpm) FM-3920 (30 slpm - 200 slpm) FM- 3925 (200 to 1000 slpm) FM-3930 (10 sccm - 30 slpm) FM-3936 (10 sccm - 30 slpm) 15-Pin “D" Connector FM-3901 (10 sccm - 10 slpm) FM-3911 (100 sccm - 30 slpm) FM-3921 (30 slpm - 200 slpm) FM-3922 (30 slpm - 200 slpm) FM- 3926 (200 to 1000 slpm) FM-3930 (10 sccm - 30 slpm) FM-3936 (10 sccm - 30 slpm)
FC-2930/FC-2936 Series Metal and Elastomer 

 Mass Flow Controllers
Card Edge FC-2900 (10 sccm - 10 slpm) FC-2910 (100 sccm - 30 slpm) FC-2920 (30 slpm - 200 slpm) FC- 2925 (200 to 1000 slpm) FC-2930 (10 sccm - 30 slpm) FC-2936 (10 sccm - 30 slpm) 15-Pin “D" Connector FC-2901 (10 sccm - 10 slpm) FC-2911 (100 sccm - 30 slpm) FC-2921 (30 slpm - 200 slpm) FC-2922 (30 slpm - 200 slpm) FC- 2926 (200 to 1000 slpm) FC-2930 (10 sccm - 30 slpm) FC-2936 (10 sccm - 30 slpm)
9-Pin “D" Connector FC-2902 (10 sccm - 10 slpm) FC-2912 (100 sccm - 30 slpm) FC-2930 (10 sccm - 30 slpm) FC-2936 (10 sccm - 30 slpm) FC-2927 (200 to 1000 slpm)
9-Pin “D" Connector FM-3902 (10 sccm - 10 slpm) FM-3912 (100 sccm - 30 slpm) FM-3930 (10 sccm - 30 slpm) FM-3936 (10 sccm - 30 slpm) FM-3927 (200 to 1000 slpm)

流量計(jì)FC-2900M 

所屬品牌美國(guó)TYLAN ，性價(jià)比較高。擁有3種電接口金手指、15針、9針。較廣應(yīng)用于半導(dǎo)體行業(yè)。

Autozero Digital Circuitry Automatically resets outputs to zero under no flow conditions, and shifts the entire calibration curve to cancel many effects of temperature coefficients and calibration drift. User-Selectable Response Time Options Offers a quick (0.5 second) step response time in short-cycle processes along with offering a controlled response for long processes. Temperature Coefficients Maintains tight control in varying temperatures Balanced Power Load Low lead current eliminates signal differing from its controlling device Power Operation Insensitive to power supply variations, and will operate within ± 12 volts to ± 18 volts Standard Design Industry standard pinouts and dimensions make the Tylan FC2900 easy to install in many systems

Process Values Designed to meet the exacting requirements of semiconductor processes and equipment, the Tylan FC2900 and FM3900 models are premium quality elastomer-sealed mass flow controllers and meters. These MFCs combine proven components and techniques with innovative concepts in both mechanical and electrical design.

流量計(jì)FC-2900M 

Full Scale (N2 equivalent)
FC2900: 10 sccm – 10 slpm FC2910: 100 sccm – 30 slpm (FC2910 used below 10 slm for low vapor pressure material delivery) Step Response Time 1 sec (dependent on step request and conditions) Accuracy ± 1.0% full scale Linearity ± 0.5% full scale Repeatability ± 0.2% full scale Pressure Coefficient 0.00001% per bar, 0.007% per psi (typical) Temperature Coefficient 0.05% per °C (zero and span) Attitude Sensitivity < 0.25% @ 90° C without autozero Mechanical Valve Normally-open or normally-closed solenoid Materials 316L stainless steel, 446 stainless steel, PFA Teflon® Elastomers Available Viton®, Kalrez®, Neoprene
Leak Integrity
1 x 10-9 atm-cc per sec (He) inboard <2% full scale with Teflon poppet (normally-closed) <5% full scale with Teflon poppet (normally-open) Weight 0.98 Kg (2 lb) Electrical Supply Voltage ± 12 VDC to  ± 18 VDC Supply Current 110 mA nominal (125 mA max @ ± 18 VDC Power Consumption 3.3 watts @ ± 15 volts Input/Output Signal 0-5 VDC Environmental Operating Temperature 5 – 50° C (ambient and gas) Humidity 0 – 90% RH, non-condensing Maximum Inlet Pressure 11.5 bar (150 psig) Differential Pressure Nominal, 0.7 – 2.8 bar (10-40 psid)