分解物 | SO2 | HF | SF4 | SOF2 | SOF4 | SO2F2 | S2F10 | SiF4 | CF4 |
zui小測(cè)量值(ppmv) | 10 | 0.5 | 3 | 10 | 5 | 3 | 2 | 5 | 3 |