采用Sharck-Hartmann技術(shù)的波前傳感器 波前分析儀，用于對激光光束分析，測量光束的波前參數(shù)。能測量M^2，激光光斑直徑，束腰位置及發(fā)散角等光束參數(shù)，同時軟件可測出系統(tǒng)的PSF及MTF。
此刻哈特曼波前傳感器 波前分析儀 指標參數(shù)如下所示：

Specification:
? Range of phase measurement - up to 15μm
? Accuracy of measurements - λ/100 (RMS)
? Input light beam diameter - 4...100 mm and more
? Number of working sub-apertures: from 400
? Working Wavelength Range: 400nm 1100nm
? Acquisition Frequency / Frame Rate: up to 60 Hz
? Pulsed & CW laser beam diagnostic
The hardware includes:
? Lenslet array
? Monochrome CCD/CMOS camera (IEEE 1394)
? IEEE 1394 Cable (6pin-6pin)
Optionally:
? Resizing lens or telescopic system
? Neutral density optical Filters in holder
? Source of reference wavefront (collimator, fiber-coupled laser for one
wavelength, holder)
The software includes:
? Wavefront Reconstruction for Circular pupil or Polygonal Mask
? Measurement of P-V
? Definition of RMS
Shark r Page 1 of 2
Shark-Hartmann Wavefront
-Hartmann Wavefront Senso
? Expansion of aberrations to Seidel and Zernike polynomials (tilts, defocus,
astigmatisms, etc.)
? Fringe Representation, 2D & 3D Wavefront
? Reconstruction of intensity distribution
? Estimation of the Beam Quality Factor M²; Beam Characterisation Parameters:
laser beam diameter, beam waist & location, Beam Divergence
? PSF, MTF