敞開式光柵尺-LIF系列
LIF系列高精度
| Model | Basline error | Substrate and mounting | Interpolation error | Measuring length | |
|---|---|---|---|---|---|
| Accuracy grade | Intervall | ||||
| LIF 471 LIF 481 | ± 1 μm ± 3 μm | ≤ ± 0.225 μm/ 5 mm | Scale of Zerodur glass ceramic or glass, bonded with PRECIMET adhesive film | ± 12 nm | 70 mm to 1020 mm |
LIF 471/481
Linear scale | LIF 401 R | |||||
Measuring standard* Coefficient of linear expansion | SUPRADUR phase grating on Zerodur glass ceramic or glass; grating period 8 µm αtherm = (0±0.1) · 10–6 K–1 (Zerodur glass ceramic) αtherm ? 8 · 10–6 K–1 (glass) | |||||
Accuracy grade* | ±1 µm (only for Zerodur glass ceramic), ±3 µm | |||||
Baseline error | ≤ ±0.225 µm/5 mm | |||||
Measuring length ML* in mm | 70 120 170 220 270 320 370 420 470 520 570 620 670 720 770 820 870 920 970 1020 | |||||
Reference marks | One at midpoint of measuring length | |||||
Mass | 0.8 g + 0.08 g/mm measuring length | |||||
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Scanning head | AK LIF 48 | AK LIF 47 | ||||
Interface | 1 VPP | ? TTL | ||||
Integrated interpolation* Signal period | – 4 µm | 5-fold 0.8 µm | 10-fold 0.4 µm | 20-fold 0.2 µm | 50-fold 0.08 µm | 100-fold 0.04 µm |
Cutoff frequency –3 dB –6 dB | ≥ 300 kHz ≥ 420 kHz | – | ||||
Scanning frequency* | – | ≤ 500 kHz ≤ 250 kHz ≤ 125 kHz | ≤ 250 kHz ≤ 125 kHz ≤ 62.5 kHz | ≤ 250 kHz ≤ 125 kHz ≤ 62.5 kHz | ≤ 100 kHz ≤ 50 kHz ≤ 25 kHz | ≤ 50 kHz ≤ 25 kHz ≤ 12.5 kHz |
Edge separation a1) | – | ≥ 0.080 µs ≥ 0.175 µs ≥ 0.370 µs | ≥ 0.080 µs ≥ 0.175 µs ≥ 0.370 µs | ≥ 0.040 µs ≥ 0.080 µs ≥ 0.175 µs | ≥ 0.040 µs ≥ 0.080 µs ≥ 0.175 µs | ≥ 0.040 µs ≥ 0.080 µs ≥ 0.175 µs |
Traversing speed1) | ≤ 72 m/min ≤ 100 m/min | ≤ 120 m/min ≤ 60 m/min ≤ 30 m/min | ≤ 60 m/min ≤ 30 m/min ≤ 15 m/min | ≤ 60 m/min ≤ 30 m/min ≤ 15 m/min | ≤ 24 m/min ≤ 12 m/min ≤ 6 m/min | ≤ 12 m/min ≤ 6 m/min ≤ 3 m/min |
Interpolation error Position noise RMS | ±12 nm 2 nm (450 kHz)2) | – | ||||
Electrical connection* | Cable, 0.5 m, 1 m, 2 m or 3 m with 15-pin D-sub connector (male); interface electronics in the connector | |||||
Cable length | See interface description, however | |||||
Voltage supply | DC 5 V ±0.25 V | |||||
Current consumption | < 175 mA | < 180 mA (without load) | ||||
Vibration 55 Hz to 2000 Hz Shock 11 ms | ≤ 200 m/s2 (EN 60 068-2-6) ≤ 500 m/s2 (EN 60 068-2-27) | |||||
Operating temperature | 0 °C to 50 °C | |||||
Mass Scanning head*
Connecting cable Connector | For Zerodur glass ceramic scale: 25 g For glass scale: 9 g 38 g/m 140 g | |||||
* Please select when ordering 1) At a corresponding cutoff or scanning frequency 2) With –3 dB cutoff frequency of the subsequent electronics | ||||||
