好處
- Wide measurement range from 1.3 × 10-9 to 6.7×10-2 mbar(1 × 10-9 to 5 × 10-2 Torr)
- Two standard long-life yttrium oxide coated iridium filaments
- All-in-One active gauge with built-in display, set-point, analog output and standard integrated RS485 digital interface
- Bright digital OLED display with keypad for simple setup, operation and programming
- User programmable set point relay
- User programmable display units in mbar, Torr or Pa
- User selectable Auto-ranging of emission current
- Mechanical strength and ruggedness
- Choice of various flange options
- Easy to exchange sensing element
- Compliance & standards: CE, RoHS
- Direct drop in replaces Granville-Phillips® 354 Micro-Ion® Module – identical control functions including softwarecommands (RS485)
(Granville-Phillips® and Micro-Ion® are registered trademarks of MKS Instruments, Andover, MA)
典型應(yīng)用
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
新聞
We are accepting orders from now on!規(guī)格
類型 | BAG302 | |
---|---|---|
Messurement range | 1.3 x 10-9 ... 6.7 x 10-2 | |
Accuracy (N2) | ||
1.3×10-8 … 6.7 ×10-2 mbar | % of reading | ±15 |
1×10-8 … 5×10-2 Torr | % of reading | ±15 |
Repeatability | % of reading | ±5 |
Degas | ||
p < 6.7="" x="">-5 | mbar | electron bombardment, 2 min (default) |
p < 5.00="" x="">-5 | Torr | (programmable between 2 ... 10 min) |
Temperature | ||
Operation (ambient) | °C | 0 ... +40 |
Storage | °C | -40 ... +70 |
Bakeout at flange (sensor only, electrics removed) | °C | 200 |
Supply voltage | V (dc) | +20 ... +28 |
Output signal analog | V | 0 ... +9 (log-linear) |
Voltage vs. pressure | volts per decade | 1 |
Setpoint relay | 1 (single-pole double-throw relay (SPDT)) 1 A at 30 V (dc) resistive, or V (ac) non-inductive | |
Electrical connection | D-Sub, 9-pin, male for analog,D-Sub, 9-pin, female for RS485 | |
Interface (digital) | RS485 | |
Emission control | manual | |
Filament | two Yt2O2 coated Ir | |
Filament status | display / digital output | |
Digital functions | degas, filament on/off and emission control | |
Materials exposed to vacuum | Yt2O3, Ir, W, Ta, stainless steel, glass, Ni | |
Mounting orientation | any | |
Internal volume | cm³ (in.³) | 16.4 (1.0) |
Weight KF / CF | 270 |
零件號
BAG302 | |
---|---|
零件號 | 明細(xì) |
352-050 | BAG302-S 9DSub,1SP,OLED,16KF |
352-051 | BAG302-S 9DSub,1SP,OLED,25KF |
352-052 | BAG302-S 9DSub,1SP,OLED,40KF |
352-053 | BAG302-S 9DSub,1SP,OLED,16CFR |
352-054 | BAG302-S 9DSub,1SP,OLED,40CFR |
352-055 | BAG302-S 9DSub,1SP,OLED,3/4in. Tube |
352-056 | BAG302-S 9DSub,1SP,OLED,8VCR |
備件
BAG302 | |
---|---|
零件號 | 明細(xì) |
352-060 | BAG302 Spare sensor 16KF |
352-061 | BAG302 Spare sensor 25KF |
352-062 | BAG302 Spare sensor 40KF |
352-063 | BAG302 Spare sensor 16CFR |
352-064 | BAG302 Spare sensor 40CFR |
352-065 | BAG302 Spare sensor 3/4in. Tube |
352-066 | BAG302 Spare sensor 1/8NPT |
數(shù)據(jù)表
手冊