Verifire™ XL 激光干涉儀是一個(gè)獨(dú)立的工作站,設(shè)計(jì)用于直徑達(dá)12英寸(300毫米)的大型平面的簡(jiǎn)單可靠計(jì)量。示例包括前表面反射器,窗口和半導(dǎo)體晶片或晶片卡盤(pán)。
這種集成的系統(tǒng)易于使用,具有重型傾斜/傾斜平臺(tái),可提供可重復(fù)的零件放置,無(wú)需定制夾具。
Verifire™ XL 激光干涉儀外形緊湊,內(nèi)置隔振,需要最小的生產(chǎn)空間。
振動(dòng)穩(wěn)健
Verifire XL系統(tǒng)包括ZYGO的QPSI™采集技術(shù),可在存在振動(dòng)的情況下進(jìn)行可靠的高精度測(cè)量。QPSI可實(shí)現(xiàn)真正的軸上表面形狀測(cè)量,而不會(huì)降低典型的生產(chǎn)振動(dòng)。
準(zhǔn)確的計(jì)量
Verifire XL系統(tǒng)中的高性能變速箱平面設(shè)計(jì)用于對(duì)重力下垂的最小靈敏度,并包括一個(gè)全區(qū)域校準(zhǔn)文件,以實(shí)現(xiàn)系統(tǒng)精度。
Mx™軟件
ZYGO專(zhuān)有的Mx™測(cè)量和分析軟件提供廣泛的操作功能和數(shù)據(jù)可視化工具,可在易于使用的界面中實(shí)現(xiàn)的測(cè)量功能。
MX軟件現(xiàn)在包括SmartAveraging®技術(shù),可幫助獲得在最短的時(shí)間量測(cè)量,以及內(nèi)置的SPC提供了強(qiáng)大的能力進(jìn)行生產(chǎn)的情況。
主要特點(diǎn):
•12“(300mm)光圈
•緊湊的占地面積,獨(dú)立系統(tǒng)
•易于零件裝載和對(duì)齊
•簡(jiǎn)單的設(shè)置和簡(jiǎn)化的操作
•內(nèi)置預(yù)對(duì)準(zhǔn)傳輸平面
•集成的隔振和QPSI™技術(shù),可在生產(chǎn)環(huán)境中進(jìn)行可靠的測(cè)量
Large-Aperture Downward-Looking Interferometer Workstation
The Verifire™ XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks.
This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing. The compact footprint, with built-in vibration isolation, requires minimal production floor space.
Vibration Robust
The Verifire XL system includes ZYGO's patented QPSI™ acquisition technology which enables reliable high-precision measurements in the presence of vibration. QPSI enables true on-axis surface form metrology, without degradation from typical production vibrations.
Accurate Metrology
The high-performance transmission flat in the Verifire XL system is designed for minimal sensitivity to gravitational sag, and includes a full-area calibration file to enable optimum system accuracy.
Mx™ Software
ZYGO's proprietary Mx™ measurement and analysis software offers a wide range of operational features and data visualization tools for unmatched measurement capability in an easy-to-use interface. Mx software now includes SmartAveraging®technology that helps to obtain the best possible measurement in the shortest amount of time, and the built-in SPC provides powerful capability for production situations.