低溫MEMS加速度計(jì)V810A系列放大輸出加速度傳感器:
V810系列加速度計(jì)產(chǎn)品是專為測量加速度和低頻振動(dòng)設(shè)計(jì)的一款高靈敏度,低噪聲的加速度傳感器,其特點(diǎn)是采用變?nèi)菔組EMS硅晶片為敏感元件,該敏感元件由一個(gè)很小的慣性質(zhì)量塊和一個(gè)撓性元件組成,該撓性元件位于兩塊極板之間。隨著質(zhì)量塊在加速度作用下發(fā)生偏移,極板之間的電容也會(huì)發(fā)生變化;包含了交流激勵(lì)和同步調(diào)制解調(diào)電路的加速度傳感器內(nèi)部信號(hào)調(diào)節(jié)器輸出與加速度成正比的模擬電壓信號(hào),單端信號(hào)輸出為2.5+/-2V; 產(chǎn)品由單端穩(wěn)壓電源提供8~36Vdc的供電,此產(chǎn)品內(nèi)置溫度補(bǔ)償電路以獲得穩(wěn)定的溫度響應(yīng)特性。敏感元件和電路組件一起封裝在小型輕巧外殼中,信號(hào)通過4針連接器輸出,也可選一體線纜輸出。帶連接器的13M1-L線纜可以與傳感器適配使用,信號(hào)地與測試對象隔離。810加速度傳感器的安裝可以通過粘合劑安裝,也可用M3的公制螺絲安裝。此產(chǎn)品廣泛應(yīng)用于需要精確測量和可靠封裝的高速列車和高空飛行器測試。810系列產(chǎn)品廣泛應(yīng)用于需要精確測量的研發(fā)領(lǐng)域,同時(shí)產(chǎn)品封裝非常適合在嚴(yán)苛的環(huán)境中使用。
傳感器特點(diǎn):
DC響應(yīng),適用于1000Hz以內(nèi)頻響,2V電壓輸出
加速度計(jì)輸出, ±10%, 25°C............................................................ ±2000 mV
加速度練成Acceleration range(g) ..................................................... 2/5/10/30/50/100/200
非線性 nonlinearity..................................................... 1%
頻響范圍(+/-3dB):
2g.................................................................................... 0 - 800 Hz
5g.................................................................................... 0 - 1700 Hz
10g.................................................................................. 0 - 2400 Hz
30g.................................................................................. 0 - 3000 Hz
50g.................................................................................. 0 - 3000 Hz
100g................................................................................ 0 - 3000 Hz
200g................................................................................ 0 - 3000 Hz
Zero................................................................................. ±20mV
溫度影響Temperature response, max:
Zero shift ......................................................................... ±0.02%SFO/°C
Scale shift........................................................................ ±0.025%/°C
Electrical
傳感器電源Power requirement: ………………................................... 5 - 30 VDC
Current consumption ....................................................... <3 mA
Electrical noise, Broadband Spectral:
0 Hz to 4 kHz.................................................................... 27μV/√Hz
Output load....................................................................... Min. 50 Kohm?
Bias output voltage........................................................... 2.5 VDC
Grounding......................................................................... Internally shielded
Environmental
傳感器工作溫度Temperature range........................................................... –55 to 125°C
Vibration limit.................................................................... 100 g peak
Shock limit........................................................................ 6,000 g peak
Resolution........................................................................ 10 -4 SFO
Sealing ............................................................................. Hermetic
Base strain sensitivity, max.............................................. 0.0002 g/μstrain
Physical
Sensing element.............................................................. MEMS(VC)
重量Weight.............................................................................. 18 grams
外殼材料Case material................................................................... 304L stainless steel