高溫惰性氣體干燥箱INH系列:
Air tight oven chamber and automatic gas control.
Heat to 600 deg-C and keep oxygen concentration less than 20 ppm.
The best for ceramic degreasing.
- Cool-down from 600 to 100 deg-C within 150 min (INH-21CD)
- Air tight with oil seal and door seal
- Lots of field results for ceramics and glass substrate
- Glass substrate, ceramic degreasing (Please contact us about safety feature.)
- Oxygen concentration meter, signal tower, inverter, optional gas line, emergency stop
| INH series specifications | |
|---|---|
| Method | Convection (Side-flow) |
| Maximum temperature(*1) | 600 deg-C |
| Operation temperature(*1) | RT+60~600 deg-C |
| Temperature distribution(*2) | ±8(at 600),±5(at 350) deg-C |
| Oxygen concentration | Less than 20 ppm |
| Load capacity | 15 kg/1 sheet |
| Chamber pressure metar | 0~2kPa |
| Thermocouple | Type-K |
| System control | Programmed controller |
| Accuracy | ±0.1%FS±1digit |
| Recipes | 19(30segment/recipe) |
| Temperature control | Auto tuning PID control |
| Cooling system | Forced cooling |
| Safety feature | Electric leak breaker, over-heat protection, motor over-load protection, control circuit breaker |
| Accessories | 2 shelves (with shelf plates)*except INH-100CD, temperature recorder |
(*1) Figures at control point in a heating chamber. | |
| INH-9CD | INH-21CD | INH-51CD | INH-100CD | |
|---|---|---|---|---|
| Max. operation temperature time (Reference) (*1) | Within 120 minutes (RT-60~600 deg-C) | Within 90 minutes (RT-60~600 deg-C) | Within 90 minutes (RT-60~600 deg-C) | Within 90 minutes (RT-60~600 deg-C) |
| O2 concentration | Within 50 minutes (N2⋅50L/min introduce) | Within 60 minutes (N2⋅90L/min introduce) | Within 90 minutes (N2⋅150L/min introduce) | Within 90 minutes (N2⋅250L/min introduce) |
| Heater power | 7.5kW(at 200V) | 12.0kW(at 200V) | 25.2kW(at 200V) | 44.1kW(at 200V) |
| Outside dimension (mm) | 1105(W) ×1650(H) ×840(D) | 1255(W) ×1800(H) ×1120(D) | 1550(W) ×1820(H) ×1360(D) | 1800(W) ×2115(H) ×1570(D) |
| Inside dimension (mm) | 450(W) ×450(H) ×450(D) | 600(W) ×600(H) ×600(D) | 800(W) ×800(H) ×800(D) | 1000(W) ×1000(H) ×1000(D) |
| Equipment weight | 450kg | 700kg | 1000kg | 1550kg |
| Exhaust port | 1B ball valve | 1 1/2 2B ball valve | ||
| Breaker capacity | AC 200V 30A 3 phases 50/60 Hz | AC 200V 50A 3 phases 50/60 Hz | AC 200V 100A 3 phases 50/60 Hz | AC 200V 150A 3 phases 50/60 Hz |
