美國(guó)APTECH調(diào)節(jié)器AZ 1000系列畢爾途專業(yè)高
AP Tech的各種調(diào)節(jié)器的入口壓力范圍高達(dá)10,000 psig（690 bar），輸送壓力從壓力到10,000 psig（690 bar）。流量也有很大的范圍，從幾sccm到數(shù)千slpm。無論是手動(dòng)彈簧加載還是氣動(dòng)驅(qū)動(dòng)，連接尺寸為1/8英寸至1英寸，AP Tech都是通過超高純氣體輸送實(shí)現(xiàn)高純度的優(yōu)選調(diào)節(jié)器。
總覽
AP Tech，也稱為高級(jí)壓力技術(shù)，是氣體處理部件的制造商，主要是壓力調(diào)節(jié)器和閥門。 AP Tech的長(zhǎng)處是通過超高純度應(yīng)用提供高純度特種氣體的產(chǎn)品。從源容器到使用點(diǎn)，再到處理工具或設(shè)備本身，*，AP Tech產(chǎn)品可提供質(zhì)量，性能和可靠性不受影響的氣體。該公司為服務(wù)和支持設(shè)定了終標(biāo)準(zhǔn)，這些特征現(xiàn)已成為AP Tech品牌的代名詞。
各種各樣的氣體輸送產(chǎn)品可滿足大多數(shù)應(yīng)用。從腐蝕性氣體源面板的挑戰(zhàn)到工藝使用點(diǎn)所需的精細(xì)控制，AP Tech產(chǎn)品在壓力下均可提供高性能。
該公司由行業(yè)人士Rene Zakhour于1987年成立。他的目標(biāo)是制造以服務(wù)和支持為后盾的可靠產(chǎn)品。如今，AP Tech現(xiàn)已成為我們半導(dǎo)體和電子行業(yè)主要市場(chǎng)的*，在他的下，并在他的工作中追求的敦促下，我們繼續(xù)努力實(shí)現(xiàn)Rene的目標(biāo)。就這么簡(jiǎn)單。
美國(guó)APTECH調(diào)節(jié)器AZ 1000系列畢爾途專業(yè)高
壓力調(diào)節(jié)器
AP Tech的各種調(diào)節(jié)器的入口壓力范圍高達(dá)10,000 psig（690 bar），輸送壓力從壓力到10,000 psig（690 bar）。流量也有很大的范圍，從幾sccm到數(shù)千slpm。無論是手動(dòng)彈簧加載還是氣動(dòng)驅(qū)動(dòng)，連接尺寸為1/8英寸至1英寸，AP Tech都是通過超高純氣體輸送實(shí)現(xiàn)高純度的優(yōu)選調(diào)節(jié)器。
Operating Parameters
Source pressure vacuum to 3,500 psig (241 bar)
AZ 1001 and TF option vacuum to 300 psig (21 bar)
Delivery pressure AZ 1001 1 to 10 psig (0.07 to 0.7 bar)
AZ 1002 1 to 30 psig (0.07 to 2 bar)
AZ 1006 2 to 60 psig (0.14 to 4 bar)
AZ 1010 2 to 100 psig (0.14 to 7 bar)
AZ 1015 5 to 150 psig (.34 to 10 bar)
AZ 1030 5 to 300 psig (.34 to 21 bar)
Proof pressure 150% of operating pressures
Burst pressure 300% of operating pressures
SS 316L construction
• 10 µin. surface finish(25 µin. optional)
• Vacuum to 3500 psig(241 bar) inlet
• 1 to 300 psig (0.07 to 21bar) outlet
• Cleaned, assembled and packaged for high purity semiconductor applications
• Flow rates- Standard to 30 slpm - HF option to 120 slpm
• Regulator of choice for point of use applications
• Knob LOTO (refer to AP KL data sheet)
• Installation and operating instructions available at
美國(guó)APTECH調(diào)節(jié)器AZ 1000系列畢爾途專業(yè)高
in the Tech Briefs section
Other Parameters
Inlet/outlet connectors 1/4 or 3/8 inch face seal or tube weld
Flow coefficient (Cv) 0.09 (0.15 HF option)
Internal volume 0.49 in3 (8 cm3)
Operating temperature -40° to +160°F (-40° to +71°C)*
Surface finish 10 µin. (0.25 µm) Ra avg. standard
25 µin. (0.62 µm) Ra avg. optional
Inboard leakage 2 x 10-10 sccs
Outboard leakage 2 x 10-9 sccs He
Leakage across seat 4 x 10-8 sccs He
Installation surface or panel (optional)
Supply pressure effect 0.25 psig per 100 psig source pressure change
HF 0.75 psig per 100 psig source pressure change
材質(zhì)：316不銹鋼
Sample Order Number AZ 1010SQ 2PW FV4 FV4
AZ1010S3PWFV4MV40
AZ1010S2PWFV4MV4
AZ1010S 2PW FV4 MV4
AZ 1010 | Series
AZ 1001 = 1-10 psig (.07 to .7 bar)
AZ 1002 = 1-30 psig (.07 to 2 bar)
AZ 1006 = 2-60 psig (.14 to 4 bar)
AZ 1010 = 2-100 psig (.14 to 7 bar)
AZ 1015 = 5-150 psig (.34 to 10 bar)
AZ 1030 = 5-300 psig (.34 to 21 bar)
S | Material
S = Stainless steel (SS)
SHP = SS/Ni-Cr-Mo alloy poppet and
S diaphragm
Q | Surface
Finish Option
Q = 25 µin. Ra avg.
2PW | Ports
2PW = 2 ports butt weld
3PW = 3 ports butt weld
4PW = 4 ports butt weld
FV4 FV4 | Connections
Inlet / Outlet
FV4 = 1/4 inch face seal female
MV4 = 1/4 inch face seal male
FV6 = 3/8 inch face seal female
MV6 = 3/8 inch face seal male
Tube weld stub available
Delivery
Gauge*
0 = No gauge
V3 = 30-0-30 psig/bar
L = 30-0-60 psig/bar
1 = 0-100 psig/bar
H = 30-0-160 psig/bar
4 = 0-400 psig/bar
10 = 0-1000 psig/bar
40 = 0-4000 psig/bar
* Standard gauge port is 1/4 inch face seal male
(1/4 inch face seal female are available).
Options
VS = Polyimide seat
TF = PTFE seat
HF = High flow
P = Panel installation**
KL = Knob LOTO (refer to AP KL data sheet)
** Panel hole 1.569 diameter.
