深圳市德勝興電子有限公司提供現(xiàn)貨庫存UV解膠機(jī)
什么是UV解膠機(jī)?
在半導(dǎo)體芯片生產(chǎn)工藝中,芯片劃片之前,要將晶圓片用劃片膠膜固定在框架上,在劃片工藝完成后,用UV光對固定膠膜進(jìn)行照射使UV膠膜粘性固化硬化,以降低劃片固定膜的粘性,以便后續(xù)封裝工序的順利生產(chǎn)。換句話講,UV膠帶具有很強(qiáng)的粘合強(qiáng)度,在晶片研磨工藝或晶片切割工藝期間,膠帶牢固地粘住晶片。當(dāng)紫外線照射時,粘合強(qiáng)度變低。因此,在紫外線照射后晶圓或芯片很容易從粘膠帶上面剝離脫落。UV解膠機(jī)解決了晶圓、玻璃和陶瓷切割工藝的解膠工序,適用行業(yè)目前不僅局限于半導(dǎo)體封裝行業(yè),還適用于光學(xué)鏡頭、LED、IC、半導(dǎo)體、集成電路板、移動硬盤等半導(dǎo)體材料UV膜脫膠使用?,F(xiàn)有技術(shù)中的UV解膠機(jī)多采用UV汞燈,而本身具有高熱量排放的汞燈光源容易對熱敏感材料照成損壞,且效率低,質(zhì)量標(biāo)準(zhǔn)難以準(zhǔn)確把控,不適合芯片等高精密 器件的照射。深圳市德勝興電子有限公司采用的環(huán)境友好型低溫LED UV光源解膠機(jī),輕易完成UV膜 脫膜工藝,且不損傷晶圓,*滿足生產(chǎn)需求。
用途:適用于光學(xué)鏡頭、LED、IC、半導(dǎo)體、集成電路板、移動硬盤等半導(dǎo)體材料,玻璃濾光片等UV膜脫膠,UV膠帶脫膠使用。UV解膠機(jī)是一種UV膜和切割膜膠帶粘性降低和粘性解除的全自動化解膠設(shè)備。晶圓、玻璃等料件,使用UV TAPE貼膠于 8寸,12寸,15寸的支架治具解膠裝置,具有高效率的解膠能力,可快速的降低UV TAPE貼于料件的黏性。
UV解膠機(jī)特點(diǎn):
1) 機(jī)身小巧,適合6/8/10/12寸芯片整片照射使用
2) 時間和亮度可調(diào),觸屏操作,簡單方便
3)自下而上照射, 方便放置晶圓
4) LED冷光源,環(huán)保產(chǎn)品,具有溫度低、曝光均勻、結(jié)構(gòu)緊湊、能耗小、是半導(dǎo)體行業(yè)的理想機(jī)型,且低溫對熱敏材料無損害
5) 使用壽命比普通汞燈壽命長10倍以上,連續(xù)使用壽命15000-30000H。
6) 零維護(hù)成本,*工作無需更換照射光源零件
7) 封閉式光源設(shè)計(jì),無紫外線側(cè)漏,對人體無損傷
參數(shù)
序號 | 內(nèi) 容 | 參 數(shù) |
1 | 適用晶圓大小 | 6” 8”10” 12‘’ (多種規(guī)格可選)6寸 8寸 10寸 12寸 |
2 | 出光面積 | Φ150mm, Φ200mm, Φ300mm |
3 | 額定電壓 | AC 110/220V |
4 | 頻率 | 50/60HZ |
5 | 額定功率 | 350-900W |
6 | UV燈波長 | 365nm-415nm可選, 常規(guī)為365nm |
7 | 外形尺寸(長*寬*高) | 320mm×384mm×247mm 尺寸可定制 |
8 | 機(jī)器重量 | 6.5kg |
9 | 膠膜類型 | UV膜 各種UV Tape |
10 | 膠膜厚度 | 0.15~2mm |
11 | 照射方向 | 自下而上照射 |
12 | 操作方式 | 觸屏操作 |
13 | 計(jì)時器設(shè)定時間 | 不限 (單位:S)時間可調(diào) |
14 | 解膠完成時間 | 以UV膠帶特性而定(可短 5秒) |
15 | 照射強(qiáng)度設(shè)定 | 20% ~ 亮度可調(diào) |
16 | 制具配件 | 按客戶要求定制 默認(rèn)5.9英寸 |
UV curing systems process wafers up to 300mm, applying even UV irradiation over the entire wafer surface and providing safe, reliable ozone-free UVA irradiation. Napolun UV curing systems provide optimal, controlled UV exposure for efficient curing using safe, ozone-free UVA irradiation for reliable, worry-free operation. Single-frame or cassette-loader models select the model that's right for you. Napolun UV curing systems provide can increase yields when dicing on UV adhesive tape. Napolun provides a wide range of manual and fully automatic systems to meet all production throughput requirements.
The great advantages of the Napolun UV curing technology is in the special dedicated design for curing of wafers mounted on dicing frames. The UV tape is used in the semiconductor assembly process to position the silicon wafer on the dicing frame while dicing. The adhesion strength between irradiated UV dicing tape and silicon is much higher while dicing the wafers, and much lower compared to non UV dicing tape (i.e. “sticky tape” or “blue tape” or "Nitto tape"). Thus, the adhesive force allow safer and faster cutting of the wafer, and after the wafer is cut, a safer and faster pick-up process from the cured tape. Napolun Systems are fully compliant with all types of tape manufacturers: Furukawa, Nitto, Lintec and others and can process all types of frames: Disco, K&S and TSK.
Our UV Curing Systems offer inexpensive solutions for the curing of UV films in easy-to-use benchtop package.